All projects
Semiconductor equipment
Vacuum handling tooling for a wafer-fab equipment OEM
Hard-anodised aluminium vacuum chucks and end-effectors for a 300 mm wafer-handling module, machined flat and particle-clean to a hundredth of a millimetre.
The brief
A Kulim-based equipment OEM needed a family of vacuum chucks and end-effectors for a new wafer-handling module — flatness held across a large face, cross-drilled vacuum galleries with no burrs, and parts clean enough to enter a fab without an extra wash step.
What we made
We machined the chucks on a 5-axis cell in a single set-up to hold flatness, deburred and flushed every gallery, then hard-anodised and packed the parts double-bagged in a controlled area. First articles shipped with full CMM reports and a cleanliness statement; the family is now on a scheduled call-off.